| 强电离放电产生臭氧气体的方法 |
| 摘要点击 1016 全文点击 2748 投稿时间：2000-09-21 |
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| 中文关键词 强电离放电 电介质 臭氧浓度 窄放电间隙 |
| 英文关键词 strong ionization discharge dielectric ozone concentration narrow discharge gap |
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| 中文摘要 |
| 为实现用电场强度、电子能量控制臭氧产生浓度和臭氧分解,采用α型Al2O3制成电介质薄层(230μm)以及窄放电间隙(110μm)的新工艺,取得折合电场强度E大于400Td的强电离放电,电子取得平均能量大于10eV,臭氧浓度达到200g/m3,臭氧产生效率达到100g/(kW·h).进而实现臭氧产生装置生产组合模块化、小型化.
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| 英文摘要 |
| This paper presents the formed methods of strong ionization discharge of dielectric barrier and plasma chemical reaction process of ozone generation. Ozone combination and decomposition are controlled by electric field intensity and electron energy. Therefore, new technologies with thinner dielectric layers (230μm) of model αAl2O3 and narrow discharge gap (110μm) are introduced, and strong ionization discharge is gained which reduced field (E) and electron average energy are more than 400Td and 10 eV respectively. Ozone concentration reaches to 200g/m3 and ozone producing efficiency is 100g/(kW·h). Ozone generator of big yield and miniaturization with module assembled method is realized. |
